One accelerometer principle
The 1.1 accelerometer consists of a MEMS sensor and a signal processing chip.
1.2 MEMS Accelerometer Working principle
It is composed of upper capacitance, medium capacitance plate (movable), lower capacitance plate, etc., when the acceleration reaches a certain value, the medium capacitance plate will move, and the distance from the upper and lower capacitance plates will change.
The upper and lower capacitance varies accordingly. Capacitance change and acceleration ratio (such as the following formula), through the output voltage digital processing, output digital signal.
Formula: (1) Vs = ((CS1-CS2)/(CS1+CS2)) * VM; output voltage is capacitor voltage change part; Vm (input voltage)
(2) The relationship between capacitance size and displacement can be derived from the definition of the capacity:
(3) by (1), (2):
(4) According to the principle of mechanics:
(5) The relationship between acceleration and output voltage:
Principle of MEMS accelerometer for inertial navigation