Common concepts for getting started with auto

1. Semi (Semiconductor Equipment and Materials International) International Semiconductor Equipment and Materials Industry Association

2. secs

Secs protocol is a Point-to-Point Protocol Based on RS-232 or TCP/IP. It consists of secs I/hsms, secs II and gem.

 

Secs I/hsms is the transmission layer, and secs II translates the binary string transmitted by secs I into an intuitive format. secs II standardizes the standard structure and display content of the transmitted data, allows you to view data content.

3. General device model of GEM (Generic Model for communications and control of manufacturing equipment)

This standard defines a set of general device action and communication functional standards. Gem defines the behavior of the semiconductor device seen by the host and the status in which secs II messages will be used. Is a subset of secs II. Defines the behavior of the semiconductor device seen by the host, and the status of the secs II message to be used.

4. hsms (high speed secs Message Services) High Speed secs Message Service

A communication interface is defined, which is suitable for message exchange between computers in the semiconductor plant using TCP/IP communication protocols. Secs I uses RS232 communication protocol as information transmission between computers.

5. EAP (equipment Automation Process) device Automation

6. FSM (Finite State Machine) finite Automatic Machine

7. stationworks

Brooks stationworks is an "intelligent" semiconductor device automation solution that Brooks (which has now been acquired by American Application Materials Company). It can also be said to be an open framework. It provides a communication bridge that enables better communication connections between machines and machines, between factory equipment and MES (Manufacturing Execution System. Stationworks contains a driver library, which currently has 150 drivers. These drivers are provided in the form of a device object model (tool-object-model: Tom, with these pre-created drivers, you can easily integrate devices with systems. Stationworks uses an open architecture and Harel state-based logic engine, enabling CIM (couputer Integrated Manufacturing Computer Integrated Manufacturing) personnel to develop their own automated control logic, to provide interfaces between MES and the machine.

The relationships between mes, stationworks applications, and devices are as follows: